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蓝宝石基LED外延片背减薄与抛光工艺研究

作者：时间：2011-08-28 来源：网络

速和压力只能使其在同一个数量级内变化。通过测量经过不同抛光时间后表面粗糙度的值，发现抛光时表面粗糙度下降的速率逐渐变慢，最后达到一个稳定值，其大小取决于所选择的工艺条件。上述结论为蓝宝石基LED外延片背减薄与抛光工艺的进一步优化提供了依据。

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关键词： 蓝宝石 LED外延片 背减薄 抛光

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