重磅 | 英诺赛科与ASML签署合作协议

2021年1月21日，中国珠海-英诺赛科科技有限公司和ASML公司达成批量购买高产能i-line和KrF光刻机的协议，用于制造先进的硅基氮化镓功率器件。

全球领先的硅基氮化镓集成器件制造商英诺赛科科技有限公司和光刻机制造厂商ASML近期达成批量购买高产能i-line和KrF光刻机的合作协议。ASML是全球芯片制造设备领导厂商，其生产的XT400和XT860 的i-line和KrF经过升级，能够在硅基晶圆上制造氮化镓功率器件。凭借其独特的TWINSCAN(双工件台)架构，ASML的i-line和KrF光刻机能提供最卓越的性能、市场上最高的生产效率以及最低的成本。双工件台技术架构已经成为全球300mm和200mm晶圆量产生产线中的先进光刻技术代表 。英诺赛科将在今年第二季度搬入首批光刻机，这是第三代半导体领域首次量产应用先进的ASML TWINSCAN(双工件台)光刻技术，这一实施标志着第三代半导体制造技术正式进入了一个全新的纪元。

英诺赛科科技有限公司成立于2015年12月，是一家致力于第三代半导体硅基氮化镓芯片制造的企业。公司成功建成投产全球首条200mm硅基氮化镓晶圆与功率器件量产生产线，主要产品包括200mm硅基氮化镓晶圆及30V-650V氮化镓功率器件。英诺赛科产品的设计与性能均达到国际最先进水平，并已广泛应用于PD快充、立体(3D)相机、移动电子设备(包括智能手机、笔记本电脑、平板电脑)等领域。英诺赛科致力于打造世界一流品牌，并为全球宽禁带半导体产业的发展做出贡献。

功率器件和电路可以通过高开关频率和高功率密度来实现高效的能源管理， 这些功能可以广泛用于快速增长的新兴市场如数据中心、可再生能源和下一代无线通讯网络等。除较小的外形尺寸外，由于其高频率、高功率密度等特性，硅基氮化镓还是快速充电，直流电网，新能源汽车等市场理想选择。“第三代半导体”材料包括氮化镓(GaN) 、碳化硅（SiC）、氮化铝（AlN）、金刚石和氧化锌（ZnO），而氮化镓(GaN)是“第三代半导体”材料的典型代表，具有广阔的市场应用前景。

2021年1月21日在珠海举行的签约仪式上，英诺赛科CEO 孙在亨先生 说：“我非常荣幸的宣布英诺赛科与ASML达成合作协议，我们将在一起努力用氮化镓技术改变未来。作为一家致力于推动第三代半导体创新革命的企业，我们需要与像ASML这样全球半导体领军的企业合作，采用更加先进的制造工艺，实现更加高的性能、良率和产出，在快速成长的各种应用领域(例如快充、TOF相机(Time-of-Flight Camera) 、智能手机、电动车、数据中心等)共同推出最先进的解决方案以及下个世代的氮化镓器件，为我们的客户、伙伴和消费者创造更有价值的产品和服务。第三代半导体是一次产业革命性的升级，变革从不简单，它需要我们携手共进，携手共进我们将实现合作共赢。

ASML全球副总裁，中国区总裁沈波表示：“我们很高兴成为英诺赛科的合作伙伴，第三代半导体在全球市场有广阔的应用前景，阿斯麦会全力提供光刻解决方案和服务，支持英诺赛科在这一领域的发展。”

“我们应用在200mm晶圆生产线上的 XT平台，包括i-line、KrF和干式ArF等光刻机，是快速增长的硅基氮化镓市场的理想长期解决方案，不仅在生产率和成本方面是这样， 随着氮化镓（GaN）材料在新领域的应用，套准精度和成像要求也会随着时间的推移而扩展。” ASML 深紫外光刻业务产品营销和业务开发高级总监Toni Mesquida Kuesters说: “我们致力于帮助英诺赛科实现其预期目标，并期待卓有成效的合作。”

关于英诺赛科

英诺赛科成立于2015年12月，是一家硅基氮化镓芯片集成制造的企业。随着科学技术的快速发展，全球电力能源应用系统正在发生巨大转变。我们的愿景就是用先进、高效、低成本的硅基氮化镓技术助力新时代高效能源系统的建设。2017年11月，英诺赛科在珠海建设完成全球首条8英寸硅基氮化镓量产线。为了满足快速爆发的市场的需求，2020年9月，英诺赛科苏州工厂建设完成。作为领先的第三代半导体技术供应商，英诺赛科的IDM全产业链集成制造模式可以为客户带来更加高效、高可靠性的解决方案，其产品可以广泛应用于云计算(数据中心)、汽车、移动电子设备等领域。
关于ASML
总部位于荷兰的ASML是全球芯片制造设备领导厂商，并且是芯片光刻技术的领导者。我们的愿景是驱动半导体的各种应用来帮助解决人类生活中各种挑战。为了实现这个目标，我们提供创新的产品和服务来帮助芯片制造商不断微缩芯片。我们不断提高产品的性能，以帮助客户持续提升芯片价值并降低成本。我们致力于让芯片的性能更强大、价格更合理，进而促使半导体技术能更广泛的应用于医疗、能源、通讯和娱乐等相关产品与服务中30多年来，ASML的成功来自于和客户及供货商紧密合作所共同创造的领先技术、高效能的流程和优秀的员工。ASML在全球16个国家的60个城市设有办公室，员工超过28000。ASML为荷兰阿姆斯特丹证券交易所和美国NASDAQ上市公司。更多关于ASML及其产品和技术、职业发展机会，请参阅: www.asml.com

January 21, 2021 – InnoScience and ASML reached a volume purchase agreement for upgraded versions of high throughput i-line and KrF TWINSCAN scanners for advanced GaN on Silicon power semiconductors

Leading GaN-on-Silicon Integrated Device Manufacturer Innoscience Technology Co., Ltd. (“Innoscience”) has recently purchased several TWINSCAN scanners from ASML Holding N.V. (“ASML”), the world’s leading provider of lithography systems to the semiconductor industry.  ASML’s XT: 400 and XT: 860 200 mm i-line and KrF scanners, respectively, will be adapted to manufacture GaN-on-Si Power Devices. These tools will not only offer the best performance, but also the highest productivity and lowest cost of ownership available in the market place.  ASML’s dual stage TWINSCAN architecture, currently represents the lithography backbone at most of the 200mm and 300 mm high volume manufacturing sites worldwide. Innoscience will receive the first systems in the second quarter of this year. Innoscience is the world first company in the wide band-gap semiconductor field to apply ASML’s advanced TWINSCAN lithography tool in mass production, this effort will bring the fast growing industry to a new era.

Lithography equipment for growing megatrends

Innoscience, which was founded in December 2015, is a company dedicated to developing GaN on Si power solutions.  Innoscience successfully established the world first 200mm GaN-on-Si Power Device mass production line, to provide a wide range of product including 30V-650V GaN-on-Si power devices. Innoscience product design and performance have reached international advanced level and are currently widely available in Power Delivery charger, 3D camera, portable device including smart phone, laptop, tablet, etc. Innoscience is committed to build a world-class brand and contribute to the wide band-gap semiconductor industry and its eco-system.

GaN-based power devices and circuits enable high switching frequencies and efficient energy management with high power densities. These features are required for rapidly growing applications such as data centers, renewable energy and the next generation of wireless networks. Alongside the much smaller size factor, GaN-on-Si is an ideal candidate for rapid charging and car electrification. Gallium nitride (GaN) is also called “third generation semiconductor”, together with other materials like e.g. silicon carbide (SiC), aluminum nitride (AlN), diamond, and zinc oxide (ZnO).

Chosen by the best in the industry

Jay Son, CEO of InnoScience, said: “I’m honored to announce Innoscience and ASML have entered into a partnership aimed at changing the future with GaN technology. As an innovation leader in the third generation semiconductors, Innoscience needs strong partnerships to fast advance its technology. By creating a cutting-edge solution together with ASML, we will offer added value to our customers, partners, and consumers in fast growing applications such as quick chargers, time-of-flight (ToF) camera, smart phones, electric vehicle, data center, etc. Together, Innoscience and ASML will develop the next-generation of GaN devices, to provide advance solutions to future power world.

Bo Shen, ASML VP and Country Manager of China said, "We are very happy to be a partner of InnoScience. The third generation of semiconductor materials has broad application prospects in the global market. ASML is committed to support customers in this field, with our broad suite of holistic lithography systems and services."

“Our TWINSCAN 200 mm XT scanner platform, including i-line, KrF and dry ArF product lines, is the ideal long-term solution for the rapidly growing GaN-on-Silicon market, not only in terms of productivity and cost of ownership, but also in terms of overlay and imaging requirements, which will evolve over time, as GaN technology is adopted across new applications” said Toni Mesquida Kuesters, Senior Director of Product Marketing & Business Development for DUV Business Line at ASML. “We are committed to help InnoScience achieve their envisaged goals and, and look forward to a fruitful cooperation.”

About Innoscience

Innoscience is an Integrated Device Manufacturer (IDM) company founded in December 2015. With the development of new technologies, the electric power grid across the world is undergoing a massive transformation. Our vision is to create an energy ecosystem with most effective and low-cost Gallium Nitride on Silicon (GaN-on-Si) power solutions. Innoscience first established a mass production line of GaN-on-Si devices in Zhuhai. In order to fulfill the rapidly growing power demands, Innoscience has inaugurated a new facility in the Suzhou in 2020. As a cutting-edge GaN technology provider, Innoscience’s IDM model guarantees high performance and reliability GaN power devices that can be used in various technical fields as cloud computing, vehicle, portable device, etc. For more information, please visit http://www.innoscience.com.cn/.

About ASML

ASML is one of the world’s leading manufacturers of chip-making equipment. Our vision is a world in which semiconductor technology is everywhere and helps to tackle society’s toughest challenges. We contribute to this goal by creating products and services that let chipmakers define the patterns that integrated circuits are made of. We continuously raise the capabilities of our products, enabling our customers to increase the value and reduce the cost of chips. By helping to make chips cheaper and more powerful, we help to make semiconductor technology more attractive for a larger range of products and services, which in turn enables progress in fields such as healthcare, energy, mobility and entertainment. ASML is a multinational company with offices in more than 60 cities in 16 countries, headquartered in Veldhoven, the Netherlands. We employ more than 28,000 people on payroll and flexible contracts (expressed in full time equivalents). ASML is traded on Euronext Amsterdam and NASDAQ under the symbol ASML. More information about ASML, our products and technology, and career opportunities is available on www.asml.com.