MEMS惯性传感器优势解析
—— THELMA制程和低成本封装方法
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本文引用地址：https://www.eepw.com.cn/article/114996.htm
参考文献
[1] B. Vigna, “MEMS Epiphany,” MEMS 2009 Conference, Sorrento Italy, January
26, 2009.
[2] Source, iSuppli Corporation, See: http://www.isuppli.com
[3] B. De Masi and S. Zerbini, “Process builds more sensitive structures,” EE Times,
November 22, 2004.
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